No Description Picture Remarks
1 Ti(plate) Ti
2 TI(ring) Ti
3 Al composite (small) Al + Ti
4 Al composite (large) Al + Ti
5 TiAl composite (mixed) Al + Ti
6 Brass composite (Brass + Ti) Brass + Ti
7 Al (plate) Al
8 Al Al


No Part No Description
1 0018W160 SOFTWARE
2 0025T105 TEPAS SOFT/ES3
3 0028T282 ILAS/ES3
4 0028T283 ILAS/ES3
5 0028T284 ILAS/ES3
6 0028T285 ERROR HISTORY SOFT/ES2
7 0028T286 NON-DISPLAY SOFT
8 0030T583 WAFER COMPUTATION SOFT
9 0030T853 LIMC ONLINE UPLOAD/ES2
10 0031T002 SEQUENCE PACKAGE/ES2
11 0031T008 JOB RETICLE EDIT/ES2
12 0031T010 PARAMETER BACK UP/ES2
13 0034T296 ONLINE SOFT/7000
14 0034T529 LAMP KIT/MPA-7000
15 0034T937 SAMSUNG APERTURE SET
16 0034T960 INLINE SOSOFT/MPA-7000
17 0035T317 Y MASKING/MPA-7500
18 0035T837 FRONT INLINE SOFT/ES5
19 0036T259 TEST RETICLE 663/ES5
20 0036T580 ILAS(FPA)/ES5 SAMSUNG
21 0036T874 CONTROL RACK PARTS/ES5
22 0037T084 CABLECOVER/MPA-7000
23 0037T447 SUBSTRATE EXCHANGE SOFTWARE
24 0037T786 SOFTWARE
25 0038T113 ADC AUTO COMPUTE SOFT
26 0038T169 IDLE SOFT/7000
27 0038T199 FRONT INLINE SOFT/ES5
28 0038T432 APERTURE
29 0038T438 AP HOLDER CASE/ES5
30 0038T549 JOB SERVER VER.2.0/IZ
31 0038T809 MASK NAME SOFT
32 0039T754 REMOTE CONSOLE MASK
33 0040T127 ENHANCED AGA/AS4
34 0040T577 IN-LINE UNIT/IZ
35 0040T744 EXHAUST DUCT/IZ
36 0040T744 OPERATION MANUAL(JPN) AS4
37 0040T745 OPERATION MANUAL (ENGLISH)
38 0042T645 8"S1 DP CHUCK
39 0042T925 LIMC UPLOAD(ONLINE) SOFTWARE(MO DISK=1PCS)
40 0043T073 TEPAS SOFTWARE
41 0043T087 ILAS(FPA)
42 0045T584 SUBSTRATE EXCHANGE SOFTWARE
43 0046T290 MASK CLEANER
44 0048T542 ON-LINE SOFTWARE(90MM DDS TAPE, 1PCS)
45 0048T543 IN-LINE SOFTWARE(90MM DDS TAPE, 1PCS)
46 0048T984 8"S1 DP CHUCK
47 0049T693 IN-LINE SOFTWARE
48 0049T694 ON-LINE SOFTWARE
49 0049T699 IN-LINE SOFTWARE
50 0051T111 FEEDBACK SYSTEM SOFTWARE
51 0051T112 DISTORTION DATA MAPPING SOFTWARE
52 0051T113 GLASS ID DISPLAY SOFTWARE
53 0051T114 FEEDBACK SYSTEM SOFTWARE
54 0051T116 ANCHOR NUT(STEEL)
55 0051T154 AUTOMATIC FEEDBACK SYSTEM SOFTWARE
56 0051T155 IN-LINE SOFTWARE FOR CANON
57 0056T035 ON-LINE SOFTWARE FOR CANON
58 0056T078 GEM1000 APPLICATION SOFTWARE(CD-R=1PCS)
59 0056T132 IN-LINE SOFTWARE(CD-R=3PCS)
60 0056T133 ON-LINE SOFTWARE(CD-R=3PCS)
61 0056T134 FEEDBACK SOFTWARE(CD-R=3PCS)
62 0056T435 FEEDBACK SOFTWARE(CD-R=3PCS)
63 0056T436 ON-LINE SOFTWARE(CD-R=3PCS)
64 0058T261 ILAS SYSTEM V1.5.04B SOFTWARE(CD-R=1PCS)
65 0058T262 TEPAS SYSTEM SOFTWARE(CD ROM=2PCS)
66 0058T297 OPERATION MANUAL
67 0058T298 SERVICE MANUAL
68 0059T098 IN-LINE SOFTWARE(CD-R=3PCS)
69 0059T099 ON-LINE SOFTWARE(CD-R=3PCS)
70 0059T100 FEEDBACK SOFTWARE(CD ROM=3PCS)
71 0059T330 IN-LINE SOFTWARE(CD-R=3PCS)
72 0059T331 IN-LINE SOFTWARE
73 0059T332 ON-LINE SOFTWARE(CD-R=3PCS)
74 0059T333 FEEDBACK SOFTWARE(CD-R=3PCS)
75 0059T621 IN-LINE SOFTWARE
76 0060T281 GEM 1000 APPLICATION SOFTWARE(CD-R=1PCS)
77 0061T574 SERVICE MANUAL(CD-R=3PCS)
78 0061T737 SERVICE MANUAL(CD-R=1PCS)
79 1776A345[AA] PROBE HOLDER TYPEZ2/IZ
80 1787A160AA BAR CODE READER UNIT
81 6S9P DUMMY SOFT 6S9P DUMMY SOFT
82 A/BVYKD68-01 SOFTWARE
83 BD0-5250-000-000A CYLINDER
84 BD1-5164-000-LGBB BLADE SET BLOCK
85 BD2-1577-000-000A HOLDER, SENSOR
86 BD2-4091-000-000A COUPLING
87 BD3-2712-000-000A PINHOLE,AL
88 BD3-3199-000-000A BALL SCREW
89 BD3-3569-000-0001A SPACER(0.1),PBP
90 BD3-3569-000-002A SPACER(0.2),PBP
91 BD3-3569-000-003A SPACER(0.3),PBP
92 BD3-3569-000-004A SPACER(0.4),PBP
93 BD3-3569-000-005A SPACER(0.5),PBP
94 BD3-3569-000-00AA SPACER(0.05),PBP
95 BD3-3569-000-00BA SPACER(0.04),PBP
96 BD3-3569-000-00CA SPACER(0.03),PBP
97 BD3-3569-000-00DA SPACER(0.02),PBP
98 BD3-3569-000-00EA SPACER(0.01),PBP
99 BD3-3569-000-010A SPACER(1.0),PBP
100 BD3-3569-000-020A SPACER(2.0),PBP
101 BD3-3569-000-030A SPACER(3.0),PBP
102 BD3-3569-000-040A SPACER(4.0),PBP
103 BD3-3569-000-050 SPACER(5.0),PBP
104 BD3-6449-000-LGBB COUPLING
105 BD3-7488-000-054A SPACER(T=5.4)
106 BD4-0752-000-000A DOG
107 BD4-1915-000-000B HOLDER
108 BD4-5396-000-000A ENCODER PLATE(X)
109 BD4-5397-000-000A ENCODER PLATE(Y)
110 BD4-5912-000-000A GEAR
111 BD4-5913-000-000A GEAR
112 BD4-6402-000-000A MOUNT
113 BD6-7780-000-000A CUSHION, NEOPRENE RUBBER *
114 BD7-1727-000-000A HOLDER, GLASS
115 BD7-1743-000-000A RING SCREW
116 BD7-2592-000-000A SPRING CATCH
117 BD7-2798-000-000B COILED SPRING
118 BD7-2886-000-000B COILED SPRING
119 BD7-3213-000-000A PLATE
120 BD7-3222-000-000A WIREROPE (MECH)
121 BD7-3769-000-000A PLATE
122 BD7-6064-000-000B PLATE,AL
123 BD7-6065-000-000B PLATE,AL
124 BD7-6066-000-000B PLATE,AL
125 BD7-6201-000-000B WHAFT,AL
126 BD7-6238-000-000 CUSHION CR
127 BD7-7882-000-000B SPACER
128 BD7-7883-000-000B SPACER
129 BD7-7989-000-000B COVER
130 BD7-8753-000-000 BASE PLATE
131 BD8-0008-000-000D BLOCK,GUIDE
132 BD8-3040-000-000D COVER, ACRYL(F)
133 BD9-3071-000-000 GUIDE, S, YAW
134 BF6-0161-000-000B MOTOR UNIT (M THETA)
135 BF6-0567-000-LGB CHGD BF6-6079, CYLINDER
136 BF6-1366-000-000A MOTOR UNIT, SUPPLY HAND
137 BF6-2019-000-000A WAFER DETECTOR UNIT
138 BF6-2255-000-000A GLASS FLAT UNIT (FOR 8INCH)
139 BF6-2567-000-000A RETICLE HAND UNIT
140 BF6-2587-000-000A PULSE MOTOR UNIT, DC 11-37.5W
141 BF6-2588-000-000A ROTARY ENCODER UNIT,W/PULLEY
142 BF6-2699-000-000A FINGER UNITR
143 BF6-2705-000-000A LIGHT GUIDE (B), CABLE, GLASS
144 BF6-2706-000-000A LIGHT GUIDE (C), CABLE, GLASS
145 BF6-2711-000-000A CHUCK FOR PA UNIT
146 BF6-2854-000-000A IMAGE FIBER CABLE(OA) ASS'Y
147 BF6-3110-000-000A AIR DUCT
148 BF6-6168-000-000A PULSE MOTOR UNIT
149 BF6-6553-000-000A MIRROR UNIT
150 BG0-4057-000-000A AFC SENSOR UNIT,R
151 BG0-4058-000-000A AFC SENSOR UNIT,L
152 BG0-7750-000-000A 1ST CONDENSER LENS UNIT
153 BG0-7754-000-000A 2ND CONDENSER LENS UNIT, (B)
154 BG0-7755-000-000A 2ND CONDENSER LENS UNIT, (C)
155 BG0-7756-000-000A 2ND CONDENSER LENS UNIT, (D)
156 BG0-7896-000-000A 2ND CONDENSER LENS (BC TYPE)
157 BG0-7907-000-000A WAFER SENSOR UNIT, ELEVATOR
158 BG3-3848-000-000D LOWER RACK UNIT, C-RACK
159 BG3-4253-000-000D OAS UNIT
160 BG3-4269-R00-JFCD WAFER CHUCK 12"
161 BG3-4272-000-000D WAFER FEEDING UNIT TYPE8(R)
162 BG3-4287-000-000 WAFER FEED HAND UNIT
163 BG3-4290-R00-000 ROBOT UNIT, R THETA, WF(R)
164 BG3-4453-000-000 MOTOR UNIT, AC15W
165 BG3-5544-000-000C PA DETECTOR UNIT (L), 8"O,F.
166 BG3-5555-000-000 S-ORDER 8Low contact point type chuck
167 BG3-5896-R00-000 SCH ROBOT UNIT(L)
168 BG3-6155-000-000D LOWER FAN UNIT 2
169 BG3-6576-R00-000 IMAGE SHIFTER UNIT
170 BG3-7949-000-000 SLIDE UNIT(X), SCH(TYPE9-L)
171 BG4-2035-000-000A IPIF-3 PCB ASS'Y
172 BG4-2041-000-000A ASCD-1 PCB ASS'Y
173 BG4-2420-000-000A COMMUNICATION RELAY PCB ASS'Y
174 BG4-2433-000-000A MOTOR UNIT DC4W
175 BG4-2815-000-000A ENCODER (X) PCB ASS'Y
176 BG4-2816-000-000A ENCODER (Y) PCB ASS'Y
177 BG4-2817-000-000A XY DISTRIBUTOR PCB ASS'Y W/IC
178 BG4-2838-000-000A PHOTO SW PCB ASS'Y, W/IC
179 BG4-2846-000-LGBB OAS AF SENSOR AMP PCB
180 BG4-2875-000-000A PA PCB ASS'Y W/IC
181 BG4-3171-000-000A USM DRV PCB ASS'Y ,W/IC
182 BG4-3505-000-000A SH PCB ASS'Y, W/IC
183 BG4-3506-000-000A PA STAGE PCB ASS'Y, W/IC
184 BG4-3518-000-000A SCH BPS PCB ASS'Y, W/IC
185 BG4-3539-000-000A ELEV 2 PCB ASS'Y, W/IC
186 BG4-3669-R00-000B IL C/D PCB ASS'YW/IC
187 BG4-4044-000-000A 2CH CCD PCB ASS'Y W/IC
188 BG4-4368-000-000A 2ND CONDENSER LENS UNIT
189 BG4-4369-000-000A BG4-4369-000-000
190 BG4-4370-000-000A BG4-4370-000-000
191 BG4-4378-R00-000 EXPOSE SHUTTER UNIT
192 BG4-4390-000-000A SYNC DET AMP PCB ASS'Y W/IC
193 BG4-4397-000-000A RPC MV DRV PCB ASS'Y W/IC
194 BG4-4398-000-000A MAGNETIC VALVE UNIT (DOOR)
195 BG4-4399-000-000A MAGNETIC VALVE UNIT (SHUTTER)
196 BG4-4400-000-000A VACUUM SWITCH UNIT
197 BG4-4429-000-000A PROCESSING 1 PCB ASS'Y W/IC
198 BG4-4430-000-000A PROCESSING 2 PCB ASS'Y W/IC
199 BG4-4432-000-000A CONTROLLER 2 PCB ASS'Y W/IC
200 BG4-4433-000-000A CONTROLLER 3 PCB ASS'Y W/IC
201 BG4-4442-000-000A MOTOR UNIT, STEPPING DC 22W
202 BG4-4444-000-000A POSITIONING U-DIST PCB ASS'Y
203 BG4-4455-000-000A RPC MOTHER PCB ASS'Y W/CONN
204 BG4-4498-000-000A OBJECTIVE LENS UNIT
205 BG4-4544-000-000A PULSE MOTOR UNIT (L-ND)
206 BG4-4545-000-000A PULSE MOTOR UNIT (R-ND)
207 BG4-4575-000-000A MAGNETIC VALVE UNIT (SS)
208 BG4-4576-000-000A MAGNETIC VALVE UNIT (TT)
209 BG4-4686-000-000A ROM PCB ASS'Y W/IC
210 BG4-4687-000-000A RF IF PCB ASS'Y W/IC
211 BG4-4918-000-000A PHOTO SW PCB ASS'Y W/INTERR
212 BG4-4930-000-000A XY DIST (Y) PCB ASS'Y W/CONN
213 BG4-4938-000000A FLAT CABLE (X1)
214 BG4-4939-000-000A FLAT CABLE (X2)
215 BG4-5347-000-000B CCD OPTF SENSOR PCB ASS'Y W/IC
216 BG4-5380-000-000A PRESSURE SWITCH UNIT
217 BG4-5459-R00-000A PIEZO DRV PCB ASS'Y W/IC
218 BG4-5913-000-000A 3RD CONDENSER LENS UNIT(I2)
219 BG4-5914-000-000A COLLIMATOR LENW UNIT (I2)
220 BG4-5993-000-000A ISOLATION MV-DRV PCB ASS'Y
221 BG4-6052-000000A PCB ASS'Y, RSCD2
222 BG4-6079-000-000A RPC CPU PCB ASS'Y
223 BG4-6374-000-000A LENS UNIT
224 BG4-6377-000-000A PCB ASS'Y, LD
225 BG4-6458-000-000A CURRENT FEED-BACK PCB ASS'Y
226 BG4-6481-000-000A 2ND CONDENSER LENS (G) UNIT
227 BG4-6569-000-000A ACCELERATION SENSOR UNIT (X)
228 BG4-6570-000-000A ACCELERATION SENSOR UNIT (Y)
229 BG4-6571-000-000A FLAT CABLE (Y1)
230 BG4-6572-000-000A FLAT CABLE (Y2)
231 BG4-6573-000-000A FLAT CABLE (Y3)
232 BG4-6579-000-000A MV CD PCB ASS'Y
233 BG4-6583-000-000A HRD SENSOR PCB ASS'Y
234 BG4-6591-000-000A A-MOUNT CD PCB ASS'Y
235 BG4-6601-R00-000B AC/DC POWER SUPPLY UNIT
236 BG4-6604-000-LGBB PULSE MOTOR UNIT (G1)
237 BG4-6610-000-000A PULSE MOTOR UNIT, DC 10W UNDER
238 BG4-6611-000-000A PULSE MOTOR UNIT, DC 10W UNDER
239 BG4-6612-000-000A PULSE MOTOR UNIT, DC 10W UNDER
240 BG4-6629-000-000A XY STAGE CPU PCB ASS'Y
241 BG4-6631-000-000A CD I/F PCB ASS'Y
242 BG4-6673-000-000A HROA CD PCB ASS'Y
243 BG4-6704-000-LGBB IL1 CD PCB ASS'Y
244 BG4-6732-000-000A LIBRARY CONTROL PCB
245 BG4-6733-000-000A LIBRARY SUB PCB
246 BG4-6748-000-000A P2 BACK PLANE PCB ASS'Y
247 BG4-6755-000-000A SH PCB ASS'Y
248 BG4-6760-000-000A 6INCH PA UNIT SEMI
249 BG4-6777-000-000C WAFER FEED HAND UNIT(TYPE-6-L)
250 BG4-6780-R00-000 SCH ROBOT UNIT
251 BG4-6783-000-000A WF SCH/PS PCB ASS'Y
252 BG4-6786-000-000A DETECTOR UNIT,A/F ELEVATOR
253 BG4-6794-000-000A WF SCH/EL PCB ASS'Y
254 BG4-6797-000-000A SENSOR AMP UNIT
255 BG4-6804-000-000A IL-SNS AMP PCB ASS'Y
256 BG4-6853-000-000A S-ORDER(販売推進課)
257 BG4-6886-000-000A PULSE MOTOR UNIT, DC 10W UNDER
258 BG4-6887-000-000A PHOTO SWITCH CABLE
259 BG4-6919-000-000A PULSE MOTOR UNIT, DC 3.6W
260 BG4-6921-000-000A PULSE MOTOR UNIT, DC10W UNDER
261 BG4-6923-000-000A AF SNS PCB ASS'Y
262 BG4-6947-000-000A MOTOR UNIT, DC 10W UNDER
263 BG4-6948-000-000A ROTARY ENCODER UNIT (PL-ENC)
264 BG4-6949-000-000A PHOTO DIODE UNIT, 560NM
265 BG4-6957-000-000A PHOTO DIODE UNIT, 561NM
266 BG4-6960-000-000A MOTOR UNIT, DC 4W
267 BG4-6973-000-000 POWER SUPPLY UNIT, AC/DC
268 BG4-6974-000-000A E-CD PCB ASS'Y
269 BG4-7001-000-000A RS-232C SWITCHING PCB ASS'Y
270 BG4-7012-000-000A MAGNETIC VALVE UNIT (V)
271 BG4-7013-000-000A MAGNETIC VALVE UNIT (H)
272 BG4-7089-000-LGBB MOTOR UNIT, DC 10W UNDER
273 BG4-7098-000-000A MICRO SWITCH UNIT
274 BG4-7121-000-000A OPTICAL FIBER CABLE (X), GLASS
275 BG4-7122-000-000A OPTICAL FIBER CABLE (Y), GLASS
276 BG4-7123-000-000A OPTICAL FIBER CABLE, GLASS
277 BG4-7247-000-000A THERMAL SENSOR UNIT
278 BG4-7267-000-000A BAR CODE READER UNIT (RETICLE)
279 BG4-7329-000-000A PPC PCB ASS'Y
280 BG4-7371-000-000A PCB ASS'T, BASIC
281 BG4-7386-000-000 SUPPORTING FRAME OF LAMP HOUSE
282 BG4-7432-000-000A CONTROLLER 1PCB ASS'Y
283 BG4-7518-000-000C WAFER FEED HAND UNIT(TYPE-6-R)
284 BG4-7521-R00-000 SCH ROBOT UNIT (R)
285 BG4-7750-000-000A STEPPING MOTOR UNIT, DC10-37.5W
286 BG4-7846-000-000A STEPPING MOTOR, DC 33.6W
287 BG4-8140-000-000A 2HC PRE-PROCESSING PCB ASS'Y
288 BG4-8141-000-000A 2CH PRE-PROCESSING PCB ASS'Y
289 BG4-8207-000-000A PHOTO DIODE UNIT
290 BG4-8422-000-000A SHUTTER UNIT
291 BG4-8535-000-000B PULSE MOTOR UNIT (BS1), DC 2.96W
292 BG4-8536-000-000B PULSE MOTOR UNIT (BS2), DC 2.96W
293 BG4-8539-000-000B IL1-CD PCB ASS'Y
294 BG4-8616-000-000A A-AMP PCB ASS'Y
295 BG4-8680-000-000B EXPO-CD PCB ASS'Y
296 BG4-8727-000-000A CABLE ASS'Y, FOR PRINTER PC
297 BG4-9150-000-000A BACK PLANE PCB ASS'Y (VME)
298 BG4-9151-000-000A FZANA IF PCB ASS'Y
299 BG4-9154-000-000A STAGE DIST. PCB ASS'Y (X)
300 BG4-9159-000-000A STAGE DIST. PCB ASS'Y (B)
301 BG4-9164-000-000A ACCELERATION SENSOR UNIT (ZF)
302 BG4-9165-000-000A ACCELERATION SENSOR UNIT (ZB)
303 BG4-9192-000-000A DISPLACEMENT GUAGE UNIT (B)
304 BG4-9194-000-000A STAGE DIST. PCB ASS'Y (Y1)
305 BG4-9195-000-000A STAGE DIST. PCB ASS'Y (Y2X)
306 BG4-9353-000-000A PHOTO DIODE UNIT
307 BG4-9588-000-000A CABLE UNIT, IL2A-5
308 BG5-0018-000-000D RT BACK PLANE PCB ASS'Y
309 BG5-0052-000-000D UPPER FAN UNIT
310 BG5-0427-000-000D SLIDE UNIT(X), SCH
311 BG5-2401-000-000 RETICLE HAND UNIT, N-6"
312 BG5-4909-000-000 SCH ROBOT UNIT
313 BG6-1025-000-000A PCB ASS'Y,MV DST MA
314 BG6-1133-000-000A CABLE ASS'Y, SCI1
315 BG6-1140-000-000A CABLE ASS'Y, SV2MA
316 BG6-1146-000-000A CABLE ASS'Y, SV2-PL
317 BG6-1161-000-000B CABLE ASS'Y, AC3
318 BG6-1190-000-000A SERVO VALVE UNIT
319 BG6-1191-000-000A SPEED SENSOR UNIT
320 BG6-1192-000-000A PCB ASS'Y, TV CPU 2000
321 BG6-1212-000-000A PCB ASS'Y, SC IF AS-2
322 BG6-1214-000-000A PCB ASS'Y, DI/DO IF AS-2
323 BG6-1222-000-000A PCB ASS'Y, AF CPU
324 BG6-1224-000-000A PCB ASS'Y, MX CPU
325 BG6-1231-000-000A PCB ASS'Y, DST 1-2 AF
326 BG6-1232-000-000A PCB ASS'Y, DST 1-3 AF
327 BG6-1235-000-000A PCB ASS'Y, DST 1-7 AF
328 BG6-1236-000-000A PCB ASS'Y, DST 1-14 AF
329 BG6-1253-000-000A MAGNETIC VALVE UNIT-A
330 BG6-1254-000-000A MAGNETIC VALVE UNIT
331 BG6-1264-000-000A PCB ASS'Y, PS-2
332 BG6-1265-000-000A PS PCB-3 ASS'Y
333 BG6-1277-000-000A PCB ASS'Y, MP CPU
334 BG6-1279-000-000A PCB ASS'Y, MC CPU
335 BG6-1281-000-000A PCB ASS'Y, MA CPU
336 BG6-1294-000-000A PCB ASS'Y, FK
337 BG6-1295-000-000A PCB ASS'Y, WH-1
338 BG6-1331-000-000A PRESSURE SWITCH UNIT, CP5.5
339 BG6-1641-000-000A PT PCB ASS'Y
340 BG6-2548-000-000A MAGNETIC VALVE UNIT (AL)
341 BG6-3023-000-000B AUTO FOCUS SENSOR UNIT
342 BG6-3127-608-000A VACUUM SENSOR UNIT
343 BG6-3128-603-000A VACUUM SENSOR UNIT
344 BG6-3187-000-000A PCB ASS'Y, POWER DISTRIBUTE
345 BG6-3282-000-000A VACUUM SWITCH UNIT-PH
346 BG6-3453-000-000A PCB ASS'Y, TV-CPU 2000 (2)
347 BG6-3580-000-000A CABLE ASS'Y, FC1
348 BG6-3613-000-000A PPC MOTOR PCB ASS'Y
349 BG6-3617-000-000A MOTOR UNIT
350 BG6-3797-000-000A PCB ASS'Y, LED DRIVE
351 BG6-3819-000-000A PCB ASS'Y, DIDO IF SA1
352 BG6-4385-R00-000C POWER SUPPLY UNIT, 5KW LAMP
353 BG6-4388-000-000A PCB ASS'Y, IL CONT
354 BG6-4402-000-000D LINEAR MOTOR UNIT, DC 70W OVER
355 BG6-4472-000-000A PCB ASS'Y, HP AXIP THETA
356 BG6-4477-000-000A PCB ASS'Y, MOTHER S
357 BG6-4504-000-000A ACCELERATION SENSOR UNIT
358 BG6-4505-000-000B ACCELERATION SENSOR UNIT
359 BG6-4506-000-000A ACCELERATION SENSOR UNIT
360 BG6-4507-000-000A ACCELERATION SENSOR UNIT
361 BG6-4569-000-000A THERMOMETEA SENSOR UNIT
362 BG6-4571-000-000A DIGITAL PANEL METER UNIT
363 BG6-4648-000-000A MOTOR UNIT, STEEPPING DC 33W
364 BG6-4662-000-000A PRESSURE SENSOR
365 BG6-4741-000-000A DSPLACEMENT SENSOR UNIT
366 BG6-4830-000-000A ASSEMBLED TO BG6-9275
367 BG6-4965-000-000A LED UNIT
368 BG6-4966-000-000A LED UNIT
369 BG6-4967-000-000A LED UNIT
370 BG6-4968-000-000A LED UNIT
371 BG6-4969-000-000A LED UNIT
372 BG6-4970-000-000A LED UNIT
373 BG6-4971-000-000A LED UNIT
374 BG6-4972-000-000A LED UNIT
375 BG6-4975-000-000A PCB ASS'Y,MX-PSLAV
376 BG6-4987-000-000A PCB ASS'Y,ML CONT
377 BG6-5021-000-000A CYLINER SENSOR UNIT
378 BG6-5042-000-000A PREESURE SENSOR UNIT
379 BG6-5148-000-000A BAR-CODE READER
380 BG6-5227-000-000A LED DISPLACEMENT SENSOR UNIT
381 BG6-5228-000-000A LED DISPLACEMENT SENSOR UNIT
382 BG6-5362-000-000A PRESSURE SENSOR UNIT
383 BG6-5374-000-000A TOGGLE SWITCH UNIT
384 BG6-5516-000-000A MOTOR UNIT,STEPPING DC 22W
385 BG6-5517-000-000A MOTOR UNIT,STEPPING DC 23W
386 BG6-5560-R00-000C MASKING BLADE UNIT. Y
387 BG6-5595-000-000B CABLE ASS'Y,A6
388 BG6-5618-000-000A CABLE ASS'Y,MOVING SECTION FC1
389 BG6-5726-000-000A ROTARY ENCODER UNIT
390 BG6-5729-000-000A PHOTO SWITCH UNIT
391 BG6-5730-000-000A PHOTO SWITCH UNIT
392 BG6-5758-000-000A ACCELERATION SENSOR UNIT
393 BG6-5860-000-000A PCB ASS'Y, ST DRV
394 BG6-5950-000-000B LASER UNIT
395 BG6-6117-000-000A PCB ASS'Y, FL CONT
396 BG6-6349-000-000B PHOTO SWITCH UNIT
397 BG6-7663-000-000 XMB UNIT
398 BG6-7665-000-000 M-7000XMAG Unit(Glass)
399 BG6-7666-R00-000 ARC UNIT
400 BG6-7671-000-000D MASK CASSETTE UNIT
401 BG6-8410-000-000D LINEAR MOTOR UNIT, DC, 10-37.5W
402 BG6-8411-000-000D LINEAR MOTOR UNIT, DC, 10-37.5W
403 BG6-8698-R00-000 LAMP LIGHTING UNIT
404 BG6-8732-000-000 PLATE CHUCK UNIT, 730*920
405 BG6-8841-R00-000 MASK LOADER HAND
406 BG6-9436-000-000 XMG UNIT
407 BG6-9437-000-000 ARC UNIT
408 BG8-2442-000-000A PCB ASS'Y, IL PRE-AMP
409 BG9-1840-000-000A AF/MV I/F PCB ASS'Y
410 BG9-1861-000-000B W-TRANSFER PCB ASS'Y
411 BG9-1884-000-000A PANEL DRIVE PCB ASS'Y
412 BG9-2155-000-000A 4CH. PRE AMP PCB ASS'Y
413 BG9-2160-000-000A RETICLE CHANGER I/F PCB ASS'Y
414 BG9-2268-000-000A LED UNIT
415 BG9-2269-000-000A LED UNIT
416 BG9-2557-000-000A PCB ASS'Y 1, PHOTO SWITCH
417 BG9-2764-000-000A SWITCH, VACUUM
418 BG9-2766-000-000A PCB ASS'Y, PHOTO SWITCH 1
419 BG9-3239-000-000A DC MOTOR DRV PCB W/IC, GE(CU35)
420 BG9-3244-000-000A LOCAL 2 PCB ASS'Y W/IC
421 BG9-3701-000-LGBB PHOTO SWITCH PCB ASS'Y
422 BG9-3715-000-000A TILT WAFER Z IF PCB ASS'Y W/IC
423 BG9-3719-000-000A IME IF PCB ASS'Y W/IC
424 BG9-3728-000-000A AF CPU PCB ASS'Y W/IC
425 BG9-3729-000-000A OPAF CPU PCB ASS'Y W/IC
426 BG9-3793-000-000B IMP-2B PCB ASS'Y W/IC
427 BG9-3794-000-000A DISPLACEMENT PRE AMP PCB ASS'Y
428 BG9-4090-000-000A RC-2 PCB ASS'Y W/IC
429 BG9-4129-000-000A MV DISTRIBUTOR 2 PCB ASS'Y
430 BG9-4131-000-000A XY STAGE PRE AMP PCB ASS'Y (Y)
431 BG9-4144-000-000A VACUUM SWITCH UNIT, (AF)
432 BG9-4350-000-000A RC-1 PCB ASS'Y W/IC
433 BG9-4352-000-000A LOCAL 1 PCB ASS'Y W/IC
434 BG9-4657-000-LGB LED UNIT (730NM)
435 BG9-4658-000-000A LED UNIT (800NM)
436 BG9-4687-000-000A 2CH OPAF PCB ASS'Y
437 BG9-4762-000-000A PA STAGE PCB ASS'Y
438 BG9-4783-000-000A INPUT/OUTPUT PCB ASS'Y
439 BG9-7083-000-000 SOFTWARE
440 BG9-8465-000-000A MAIN CPU PCB ASS'Y
441 BG9-9045-000-000A PS PCB ASS'Y
442 BG9-9667-000-000A PCB ASS'Y, CCD DR 1 W/1C
443 BG9-9668-000-000A PCB ASS'Y, CCD DR 2
444 BH0-4262-000-000A LED
445 BH0-4263-000-000A LED BD1701R, BRACKET
446 BH0-4297-000-000A PHOTO INTERRUPTER, TLP1204
447 BH0-4387-000-000A PHOTO SENSOR
448 BH0-4393-000-000A PHOTOMULTIPLIER TUBE, R1355-01
449 BH0-4419-000-000B BASIS IMAGE SENSOR
450 BH0-8012-000-000A AMPLIFIER LED
451 BH0-8026-000-000B O2 SENSOR UNIT
452 BH2-0057-000-000A BH2-0723-000 MOTOR
453 BH2-0646-000-000A MOTOR UNIT, DC.24V, 78W
454 BH2-0647-000-000A MOTOR UNIT, DC.24V, 79W
455 BH2-0648-000-000A MOTOR UNIT, DC.24V, 80W
456 BH2-06617-000-000A MOTOR, AC 15W
457 BH2-0662-000-000A MOTOR, AC 7.3W
458 BH2-0721-000-000A LINEAR MOTOR (THETA A)
459 BH2-0722-000-000A LINEAR MOTOR (THETA B)
460 BH2-0723-000-000A STEPPING MOTOR DC20V, 0.03W
461 BH2-0725-000-000A LINEAR MOTOR(X), DC 70W OVER
462 BH2-0726-000-000A LINEAR MOTOR(YL), DC 71W OVER
463 BH2-0727-000-000A LINEAR MOTOR(YR), DC 72W OVER
464 BH2-1080-000-LGBC MAGNETIC VALUE(I) (std)
465 BH2-1163-000-000A MAGNETIC VALUE
466 BH2-1168-000-000A SOLENOID VALVE
467 BH3-0800-000-000A MICRO SWITCH
468 BH3-0852-000-000A MICRO SWITCH, D2MSL2-C OMRON
469 BH3-2125-000-000A FUSE (1A)
470 BH3-2190-000-000A FUSE, 1A AC125V
471 BH3-2191-000-000A FUSE, 3A AC125V
472 BH3-3259-000-LGBB AR LASER HEAD
473 BH5-34295-000-000A DC POWER SUPPLY UNIT
474 BH5-3685-R00-000 LIGHTING CONTROL PANEL,UNIT
475 BH5-4211-000-0KPC CRT DISPLAY MONOCHROME
476 BH5-4288-000-000 DISPLAY,LCD
477 BH5-6241-000-000A PRESSURE SENSOR,PSA4-103G-CN
478 BH5-6242-000-000A PRESSURE SENSOR,PSA4-102V-CN
479 BH5-6249-000-000A OPTICAL FIBER CABLES, GLASS/PL
480 BH5-6254-000-000A OPTICAL SCALE-X, LIP101R
481 BH5-6256-000-000A ELECTRO.CAPACITIVE SENSOR UNIT
482 BH5-6257-000-000A PRESSURE SENSOR
483 BH5-6258-000-000A ATMOSPHERIC TRANSDUCER
484 BH5-7294-000-000A PCB
485 BH5-7567-000-000A AMPLIFIER
486 BH5-7634-000-000 LIGHT SOURCE UNIT
487 BH5-7677-000-000A AMPLFIER UNIT
488 BH5-7742-000-000A CHIME PHONE (BUZZER)
489 BH5-7748-000-000A AMPLIFIER
490 BH5-7948-000-000A SP PRINTER,BJ
491 BM3-1136-000-000 SUPPORT UNIT,ES2
492 BN9-4644-020-000A MIRROR (139 X 44)
493 BN9-4709-030-000A MIRROR (UV)
494 BN9-4730-000-000A MIRROR
495 BN9-6168-000-000A COLD MIRROR
496 BN9-6168-030-000A COLD MIRROR
497 BN9-6169-000-000A PLANE MIRROR
498 BN9-6206-000-000A COLD MIRROR
499 BN9-6347-020-000A OPTICAL IMAGE CABLE GLASS
500 BN9-6545-000-006A ND FILTER (6%)
501 BN9-6545-000-010A ND FILTER (10%)
502 BN9-6545-000-018A ND FILTER (18%)
503 BN9-6545-000-035A ND FILTER (35%)
504 BN9-6545-000-050A ND FILTER (50%)
505 BN9-6545-000-070A ND FILTER (70%)
506 BN9-6634-000-000B FILTER, I-LINE
507 BN9-7005-000-030A OPTICAL FILTER,ND(T=30)
508 BN9-7005-000-035A OPTICAL FILTER,ND(T=35)
509 BN9-7005-000-050A OPTICAL FILTER,ND(T=50)
510 BN9-7005-000-059A OPTICAL FILTER,ND(T=59)
511 BN9-7005-000-070A OPTICAL FILTER,ND(T=70)
512 BN9-7008-000-000A PLAIN MIRROR
513 BN9-7009-000-000A PLAIN MIRROR
514 BN9-7052-000-420A FILTER(ND42),OPTICAL
515 BN9-7052-000-480A FILTER(ND48),OPTICAL
516 BN9-7052-000-550A FILTER(ND55),OPTICAL
517 BN9-7052-000-630A FILTER(ND63),OPTICAL
518 BN9-7052-000-730A FILTER(ND73),OPTICAL
519 BN9-7052-000-850A FILTER(ND85),OPTICAL
520 BN9-7406-000-000A MIRROR
521 BN9-7407-000-000A MIRROR
522 BN9-7480-000-000A LIGHT GUIDE, CABLE, GLASS
523 BN9-7905-000-000A MIRROR
524 BN9-7906-000-000B HALF MIRROR (R 50)
525 BN9-7907-000-000A MIRROR(15)
526 BN9-7908-000-000A MIRROR(15)
527 BN9-7909-000-000A MIRROR
528 BN9-7918-000-000A ND FILTER(12%)
529 BN9-7944-000-000A MIRROR
530 BN9-8586-000-000A CHGD Y60-4911,GLASS
531 BS0-4055-000-000A WASHER, PL
532 BS0-5029-000-000B KNOB SCREW,M4,SUS
533 BS0-9055-000-000 SPRING,AIR CR
534 BS1-1502-000-000B SPRING, COIL, SUS
535 BS1-1562-000-000B SPRING
536 BS1-1576-000-000A COILED SPRING
537 BS2-3232-000-000A HARMONIC DRIVE
538 BS2-4116-000-000A BELT
539 BS2-4293-000-000A TIMING BELT, B-100S3M741
540 BS2-4300-000-000A TIMING BELT, COGGED, RUBBER
541 BS2-4304-000-000A TIMING BELT, COGGED, RUBBER
542 BS2-4305-000-000A TIMING BELT, COGGED, RUBBER
543 BS2-4308-000-000A TIMING BELT, COGGED, RUBBER
544 BS2-4309-000-000A TIMING BELT, COGGED, RUBBER
545 BS2-4321-000-000A TIMING BELT, COGGED, RUBBER
546 BS2-4326-000-000A PULLEY
547 BS2-5144-000-000A LM GUIDE
548 BS6-0788-000-000A XYZ STAGE
549 BS6-1360-000-000A AIR CYLINDER
550 BS6-1374-000-000A AIR CYLINDER
551 BS6-1420-000-000 TUBE (GREEN) (PER METER)
552 BS6-2560-000-000C FILTER,AIR(EPIX FILTER)
553 BS6-2561-000-000C FILTER,AIR(EPIX FILTER)
554 BS6-2562-000-000C FILTER,AIR(EPIX FILTER)
555 BS6-2563-000-000C FILTER,AIR(EPIX FILTER)
556 BS6-2564-000-000C FILTER,AIR(EPIX FILTER)
557 BS6-2565-000-000C FILTER,AIR(EPIX FILTER)
558 BS6-2566-000-000C FILTER,AIR(ORGANIC FILTER)
559 BS6-2567-000-000C FILTER,AIR(ORGANIC FILTER)
560 BS6-2568-000-000C FILTER,AIR(ORGANIC FILTER)
561 BS6-2689-000-000 FILTER,AIR(EPIX FILTER)
562 BS6-2694-000-000C FILTER,AIR(EPIX FILTER)
563 BS6-3291-000-000 FILTER,AIR(ORGANIC FILTER)
564 BS6-7034-000-000A THICKNESS GAUGE
565 BS7-1252-000-000A TEE
566 BS7-1306-000-000B ELBOW
567 BS7-1320-000-000B STRAIGHT
568 BS7-4025-000-000A CYLINDER
569 BS7-4026-000-000A CYLINDER
570 BS7-4028-000-000A CYLINDER
571 BS7-4029-000-000A CYLINDER
572 BS7-4032-000-000A CYLINDER
573 BS7-4033-000-000A CYLINDER
574 BS7-4035-000-000A CYLINDER
575 BS7-4052-000-000A CYLINDER
576 BS7-4072-000-000A AIR CYLINDER
577 BS7-4085-000-000A AIR CYLINDER
578 BS7-4103-000-000A CYLINDER
579 BS7-4111-000-000C BF DIAPHRAGM SYLINDER
580 BS7-5060-000-000B VALVE,REGULATOR
581 BS7-5061-000-000B VALVE,REGULATOR
582 COOLING PLATE1 COOLING PLATE FOR FPA-5000ES3
583 M-6 SPECIAL S/W 4X1 Special Exposure Mode S/W(C-4)
584 M-75 F/B SOFT MPA-7500 FED BACK SOFT
585 M-75 INLINE SOFT MPA-7500 INLINE SOFT
586 MANUAL F/B SYS Manual Feedback System FOR MPA-7500CF
587 MASK TEM CONT S/W Mask Temperature Control S/W
588 SOFTWARE(25-26) 1Lot 25段=>26段 更software(lpl p-5)
589 SQ3 KIT ADJUSTING UNIT CONVEX MIRROR
590 SSBVV2356A TEST RETICLE NO.731
591 SSBVV2406A TEST RETICLE #691-02
592 VD7-0322-001-LGB FUSE, 2A 125A/AC
593 VD7-0421-001-000A FUSE, 1A 25V
594 VD7-0421-001-LGBB FUSE, 1A 26V
595 VD7-1511-502-LGBB FUSE, 15A
596 VS1-0279-003-000A CONNECTOR
597 WA3-3585-000-000A IC, AT28C256-15PC, EP-ROM <1>
598 WC2-0547-000-000A SWITCH,PUSH
599 WC2-5260-000-000A PUSH BUTTON SWITCH
600 WD1-0080-000-000A FUSE, 1A
601 WE8-5104-000-000A FERRITE CORE
602 WG1-5065-000-000A LED, SATOH
603 WG1-5408-000-000A LED LAMP, PILOT
604 WG2-5100-000-000A LED INDICATOR
605 WG8-0334-000-000A OPTICAL FIBER UNIT E32-L25
606 WG8-0335-000-000A PHOTO SENSOR
607 WG8-0336-000-000A IC, GP1S27, PHOTO INTERRUPTER
608 WG8-5028-000-000A CHGD WG8-5304 PHOTO SENSOR
609 WG8-5086-000-000A PHOTOELECTRIC SWITCH
610 WG8-5087-000-LGBB OPTICAL FIBER CABLE PL4(IMAGE)
611 WG8-5088-000-LGB IC, EE-SY671, HYBRID
612 WG8-5126-000-000A OPTICAL FIBER CABLE, P.ETHYLEN
613 WG9-5004-000-000A AMP UNIT
614 WL1-0093-000-000A MOTOR,DC 1W
615 WL3-5014-000-000A FAN
616 WL3-5028-000-000B FAN, AC 11W
617 WL3-5029-000-000B FAN,AC 18W
618 WL9-5019-000-000A DRIVER UNIT, MOTOR AK-BX56M1
619 WP8-5001-000-000A DIGITAL PRESSURE SENSOR
620 WP8-5006-000-000A PRESSURE SENSOR DPX-L00
621 WS3-1193-000-000A CONTACT, SOCKET
622 X62-0550-000-000A MICROSWITCH
623 XB1-3300-606-000 SCREW, MACHINE M3X6
624 XB7-1040-126-000 BOLT, HEXAGON
625 XB8-1030-452-000A HELISERT
626 Y60-0674-000-000A PULSE MOTOR UNIT, DC 10W UNDER
627 Y60-0697-000-000A MOTOR UNIT, DC 0.1W
628 Y60-0705-000-000B BAR MIRROR (Y)
629 Y60-0712-000-100A SPACER(1.00MM)
630 Y60-0713-000-004A SPACER(1.004MM)
631 Y60-0714-000-080A SPACER(0.8MM)
632 Y60-0714-000-090A SPACER(0.9MM)
633 Y60-0714-000-100A SPACER(1.0MM)
634 Y60-0714-000-110A SPACER(1.1MM)
635 Y60-0714-000-130A SPACER(1.3MM)
636 Y60-0715-000-010A SPACER(0.01MM)
637 Y60-0715-000-020A SPACER(0.02MM)
638 Y60-0715-000-030A SPACER(0.03MM)
639 Y60-0715-000-040A SPACER(0.04MM)
640 Y60-0715-000-060A SPACER(0.06MM)
641 Y60-0716-000-001A SPACER(0.001MM)
642 Y60-0716-000-002A SPACER(0.002MM)
643 Y60-0716-000-005A SPACER(0.005MM)
644 Y60-0718-000-000A LI UNIT
645 Y60-0726-000-000A 3RD CONDENSER LENS UNIT (UL32)
646 Y60-0728-000-000A COLLIMATOR LENS UNIT (UL32)
647 Y60-0800-000-000A MOTOR UNIT FOR 1ST COND.LENS
648 Y60-0837-000-000A CABLE UNIT
649 Y60-0838-000-000A CABLE UNIT
650 Y60-0839-000-000A CABLE UNIT
651 Y60-0840-000-000A CABLE UNIT
652 Y60-0851-000-000A PHOTO DIODE UNIT
653 Y60-0863-000-000 C H E D Y60-0863-020LENS UNIT,1ST CONDENSER LA
654 Y60-0864-000-000A SENSOR & PCB UNIT (CH1,2,3)
655 Y60-0865-000-000A SENSOR & PCB UNIT (CH4)
656 Y60-0873-000-000A ND FILTER DRIVER UNIT
657 Y60-0883-000-000A ROTARY SOLENOID UNIT
658 Y60-0937-000-000C PA STAGE UNITR,5"-8"
659 Y60-0941-000-000A WAFER SEND HAND UNIT,TYPE-4-L
660 Y60-0948-000-000A LENS UNIT 2
661 Y60-0981-000-000B PLAIN PARALLEL PLATE UNIT 1
662 Y60-0986-000-000B POLARIZER FILTER UNIT
663 Y60-1007-000-000C COMPUTER,HP9000 712/100
664 Y60-1013-000-000A PHOTOCHEOMIC PLATE UNIT
665 Y60-1095-R00-000 WAFER STAGE UNIT,I5 (XY-STAGE)
666 Y60-1240-000-000 WORKSTATION
667 Y60-1312-000-0KRD WORKSTATION
668 Y60-1423-000-0KPD WORKSTATION
669 Y60-1458-000-000D STOPPER SWITCHING UNIT,EX6
670 Y60-1479-R00-000 RETICLE ROBOT UNIT
671 Y60-1480-R00-000 CASSETTE ROBOT UNIT
672 Y60-1694-000-000D CHUCK MAINTEANCE UNIT,ES3
673 Y60-3011-000-000A MO DISK(3.5"),SONY EDM-128
674 Y60-3015-000-000A IC,HD6475328CP10,MCU,16BIT <2>
675 Y60-3017-000-000A IC,AT28C256-15PC,EPROM,256K <1>
676 Y60-3027-000-000B IC,HD6475328CP10,MCU,16BIT <2>
677 Y60-3030-000-000A IC,AT27HC 642R-35DC,EPROM
678 Y60-3030-020-000A IC,AT27HC 642R-36DC,EPROM <1>
679 Y60-3047-000-000B IC,HD6475328CP10,MCU,16BIT <2>
680 Y60-3060-000-000A IC,HD6475328CP10,MCU,16BIT <2>
681 Y60-3082-000-000A IC,HN27C256AG-12,EPROM 256K <1>
682 Y60-3084-000-000A IC,MBM27C512-20,EPROM 512K <1>
683 Y60-3085-000-000A IC,HD637B01Y0P,MCU 8BIT <2>
684 Y60-3098-000-000A CARTRIDGE TAPE,88140LC,HP
685 Y60-3099-000-000A IC,HN27C512AG-20N,EPROM,512K
686 Y60-3136-000-000A IC,HD6475328CP10,MCU,16BIT, <2>
687 Y60-3139-000-000A IC,HD637B01YOP,MCU 8BIT <2>
688 Y60-3174-000-000A IC,HN27C512AG-20N,EPROM,256K
689 Y60-3202-000-000A IC,HD6475328CP10,MCU,16BIT <2>
690 Y60-3254-000-000A IC,HN27C101AG-10,EPROM,1MB <1>
691 Y60-3304-000-000A IC,HD6475328CP10,MCU,16BIT <2>
692 Y60-3305-000-000A CD80-CD2 V1.5
693 Y60-3362-000-000A IC,HD6475328CP10,MCU,16BIT <2>
694 Y60-3363-000-000A IC,HD6475328CP10,MCU,16BIT <2>
695 Y60-3408-000-000A IC,HN27C101AG-10,EPROM,1MB <1>
696 Y60-3416-000-000A IC,HD6475328CP10,MCU,16BIT <2>
697 Y60-4195-000-000A PULSE MOTOR UNIT-XMG (F)
698 Y60-4196-000-000A PULSE MOTOR UNIT-XMG (F)
699 Y60-4200-000-000A POWER SUPPLY UNIT-LASER
700 Y60-4217-000-000A PULSE MOTOR UNIT-AS(Y)
701 Y60-4220-000-000A PULSE MOTOR UNIT-AS(X)
702 Y60-4231-000-000A PULSE MOTOR UNIT-AS(X)
703 Y60-4232-000-000A PULSE MOTOR UNIT-AS(Y)
704 Y60-4233-000-000A PULSE MOTOR UNIT-AS(IL)
705 Y60-4531-000-000A PAD UNIT(L),PH
706 Y60-4725-000-000A LINEAR MOTOR UNIT,DC 70W OVER
707 Y60-4726-000-000A LINEAR MOTOR UNIT,DC 70W OVER
708 Y60-4727-000-000A LINEAR MOTOR UNIT,DC 70W OVER
709 Y60-4728-000-000B MOTOR UNIT
710 Y60-4729-000-000A BAR MIRROR(PL-Y/THERA)&CASE
711 Y60-4730-000-000A BAR MIRROR(PL-X)&CASE
712 Y60-4731-000-000A BAR MIRROR(MA-Y/THERA)&CASE
713 Y60-4733-000-000B Z SENSOR UNIT,P2
714 Y60-4735-000-000A SENSOR UNIT
715 Y60-4836-000-000 BAR MIRROR UNIT
716 Y60-4850-000-000 MASKING BLADE UNIT(XL)
717 Y60-5064-000-000 MASKING BLADE UNIT,(YF)
718 Y60-5522-000-000 SHEET UNIT,Y MOVING,TEFLIN( R)
719 Y75-0123-000-000A FUSE(3A)
720 Y75-1026-000-000A TEMPERATURE DISPLAY
721 Y75-1027-000-000A TEMPERATURE DISPLAY
722 Y75-1056-000-000A X-TERMINAL(W/O KEYBOARD,MOUSE)
723 Y75-1058-000-000A OVERHEAT PREVENTIVE DEVICE
724 Y75-1174-000-000B FUSE
725 Y75-2169-000-000 ULPA FILTER
726 Y75-2171-000-000 ULPA FILTER
727 Y75-4001-000-000A TEMPERATURE SENSOR, (C-OIL)
728 Y75-4001-000-LGBB TEMPERATURE SENSOR, (C-OIL)
729 Y75-4002-000-000A TEMPERATURE SENSOR, (BOOTH-1)
730 Y75-4003-000-000A TEMPERATURE SENSOR, (BOOTH-2)
731 Y75-4100-000-000A NOISE FILTER
732 Y75-4132-000-000A OVERHEAT PREVENTIVE DEVICE
733 Y75-4423-000-000A SWITCH, AUTO PRESSURE
734 Y75-4720-000-000A CIRCUIT PROTECTOR
735 Y75-4737-000-000A RELAY
736 Y75-4739-000-000A HEATER
737 Y75-4740-000-000A HEATER
738 Y75-4742-000-000A FAN,SCIROCCO
739 Y75-4745-000-000A VOLUME DAMPER,SUS
740 Y75-4746-000-000A AIR FILTER,ULPA
741 Y75-4748-000-000A DIGITAL INDICATOR
742 Y75-4755-000-000A CIRCUIT PROTECTOR
743 Y75-4756-000-000A CIRCUIT PROTECTOR
744 Y75-4757-000-000A CIRCUIT PROTECTOR
745 Y75-4758-000-000A CIRCUIT PROTECTOR
746 Y75-4759-000-000A CIRCUIT PROTECTOR
747 Y75-4760-000-000A CIRCUIT PROTECTOR
748 Y75-4761-000-000A CIRCUIT PROTECTOR
749 Y75-4762-000-000A CIRCUIT PROTECTOR
750 Y75-4763-000-000A CIRCUIT PROTECTOR
751 Y75-4764-000-000A CIRCUIT PROTECTOR
752 Y75-4765-000-000A CIRCUIT PROTECTOR
753 Y75-4766-000-000A CIRCUIT PROTECTOR
754 Y75-4779-000-000A CIRCUIT PROTECTOR
755 Y75-4781-000-000A CIRCUIT PROTECTOR
756 Y75-4783-000-000A CIRCUIT PROTECTOR
757 Y75-4819-000-000A ALARM BUZZER
758 Y75-4885-000-000A HEATER
759 Y75-4886-000-000A HEATER
760 Y75-4893-000-000A THERMOMETER
761 Y75-4926-000-000B THERMOMETER SENSOR, (LENS)
762 Y75-4927-000-000B THERMOMETER SENSOR, (C-OIL)
763 Y75-4929-000-000B THERMOMETER SENSOR, (BOOTH-1)
764 Y75-4933-000-000 FILTER,AIR(EPIX FILTER)
765 Y75-4934-000-000 FILTER,AIR(EPIX FILTER)
766 Y75-4936-000-000 FILTER,AIR(EPIX FILTER)
767 Y75-4937-000-000 FILTER,AIR(EPIX FILTER)
768 Y75-4940-000-000 FILTER,AIR(ORGANIC FILTER)
769 Y75-4941-000-000 FILTER,AIR(ORGANIC FILTER)
770 Y75-5013-000-LGBB RECORDING PAPER
771 Y75-5141-000-000A A400+CPU PCB ASS'Y W/IC
772 Y75-5176-000-000A MERCURY LAMP, 250W
773 Y75-5359-000-000A TEMPERATURE SENSOR (BOOTH)
774 Y75-5483-000-000A SWITCHING REGULATOR (PM303)
775 Y75-5494-000-000A SWITCHING REGULATOR (PM406)
776 Y75-5652-000-000A FUSE (1A)
777 Y75-5654-000-000A FUSE (3A)
778 Y75-5655-000-000A FUSE (10A)
779 Y75-5667-000-000B EM SWITCH, SC-4N/200V
780 Y75-5671-000-000A BREAKER
781 Y75-5673-000-000B BREAKER
782 Y75-5674-000-000A BREAKER
783 Y75-5725-000-000A FLOW METER
784 Y75-5742-000-000B FUSE
785 Y75-5746-000-000A ULPA FILTER(AIR TYPE)
786 Y75-5766-000-000 REFRIGERATOR
787 Y75-5806-000-000A BREAKER
788 Y75-5886-000-000 FAN
789 Y75-6008-000-000A FOIL,CHAMBER WINDOW
790 Y75-6009-000-000A RETAINER RING, CHAMBER WINDOW
791 Y75-6010-000-000A BEAM SPLITTER, CHAMBER WINDOW
792 Y75-6011-000-000A MIRROR, 10% REFLECTION
793 Y75-6013-000-000A O-RING, CHAMBER WINDOW, PL
794 Y75-6026-000-000A POWER SUPPLY, PM11
795 Y75-6031-000-000A POWER SUPPLY, PM21
796 Y75-6032-000-000A POWER SUPPLY, PM-36
797 Y75-6033-000-000A POWER SUPPLY, PM-16
798 Y75-6085-000-000A AIR FILTER,FLUORIDE
799 Y75-6317-000-000C DISPLAY
800 Y75-8414-R00-000 FAN
801 Y78-3607-000-000 STOPPER SWITCHING UNIT(L)
802 Y78-3608-000-000 STOPPER SWITCHING UNIT(R)
803 Y78-3989-000-000 PLATE CHUCK UNIT, 1100X1250


No Part No Description
1 BD0-2848-000-000 SPACER
2 BE1-7496-000-500 SPACER(L=5.0)
3 BE2-3906-000-000 "SPRING,PLATE"
4 BE2-6660-000-000 "PLATE, LM GUIDE (LEFT)"
5 BE2-6661-000-000 "PLATE, LM GUIDE (RIGHT)"
6 BE2-6670-000-000 "COVER, LM GUIDE (LEFT)"
7 BE2-6671-000-000 "COVER, LM GUIDE (RIGHT)"
8 BE2-7901-000-000 "PLATE,RUBBER"
9 BE4-2357-000-000 HOLDER STAY
10 BE6-1462-000-000 INSULATION(YL-A)
11 BE6-8146-000-110 SPACER(T=11.0)
12 BG3-2097-000-000 MT RACK UNIT
13 BG3-3842-000-000D DCON2 PCB ASS'Y
14 BG3-3862-000-000 TEST RETICLE(NO.417-01)
15 BG3-3878-000-000D "DRIVE UNIT,MOTOR (PO)"
16 BG3-3894-000-000 SERVO VALVE UNIT
17 BG3-6822-000-000 LIBRARY SUB PCB ASS'Y
18 BG3-7428-000-000 TEST RETICLE(NO.417-01)
19 BG3-7882-000-000 AIN-LSTG PCB ASS'Y
20 BG4-2765-000-000 OPTF CPU PCB ASS'Y W/IC
21 BG4-6605-000-000 "PULSE MOTOR UNIT, DC 10W UNDER"
22 BG4-6867-000-000 CD80-CD PCB ASS'Y
23 BG4-8196-000-000 LIBE-ELEVATOR CONTROL
24 BG5-3745-000-000 LI SENSOR UNIT
26 BG5-4430-000-000 PCON-CS PCB ASS'Y
27 BG5-4460-000-000 UL-DRU PCB ASS'Y
28 BG5-4461-000-000 UL-AD PCB ASS'Y
29 BG5-4464-000-000 SWT-CS PCB ASS'Y
30 BG5-4991-000-000 VALVE UNIT
31 BG5-4993-000-000 VACUUM SENSOR UNIT
32 BG5-5854-000-000 OXYGEN METER UNIT
33 BG5-5855-000-000 OXYGEN METER UNIT
34 BG5-6321-000-000 CAP6 PCB ASS'Y
35 BG5-6352-000-000 OXYGEN METER UNIT
36 BG5-6492-000-000 AF1301B-SN PCB ASS'Y
37 BG5-6526-000-000 AS-CS PCB ASS'Y
38 BG5-6842-000-000 AF SENSOR PCB ASS'Y
39 BG5-6976-000-000 SHP-SN-PCB ASS'Y2
40 BH2-1043-000-000 MAGNETIC VALVE
41 BH5-6538-000-000 JOULEMETER PROBE
42 BM3-0035-000-000 GSS-PCB ASS'Y
43 BM3-0181-000-000 JUNCTION PCB ASS'Y
44 BM3-0235-000-000 RS-FET-SWITCH(L) UNIT
45 BM3-0236-000-000 RS-FET-SWITCH(R) UNIT
46 BM3-0275-000-000 PANEL-SIO-PCB2 ASS'Y
47 BM3-0391-000-000 DCON-AIN PCB ASS'Y
48 BM3-0453-000-000 "REMOTE CONTROL UNIT, SLAVE"
49 BN9-2271-000-050 "FILTER,ND (5%)"
50 BN9-2271-000-100 "FILTER,ND (10%)"
51 BN9-2271-000-150 "FILTER,ND (15%)"
52 BN9-2271-000-200 "FILTER,ND (20%)"
53 BN9-2271-000-250 "FILTER,ND (25%)"
54 BN9-2271-000-300 "FILTER,ND (30%)"
55 BN9-2271-000-345 "FILTER,ND (34.5%)"
56 BN9-2271-000-370 "FILTER,ND (37%)"
57 BN9-2271-000-400 "FILTER,ND (40%)"
58 BN9-2271-000-430 "FILTER,ND (43%)"
59 BN9-2271-000-460 "FILTER,ND (46%)"
60 BN9-2271-000-500 "FILTER,ND (50%)"
61 BN9-2271-000-550 "FILTER,ND (55%)"
62 BN9-2271-000-600 "FILTER,ND (60%)"
63 BN9-2271-000-660 "FILTER,ND (66%)"
64 BN9-2271-000-730 "FILTER,ND (73%)"
65 BN9-4819-000-000 COLD MIRROR (87MM)
66 BN9-5519-000-000 I LINE CUT FILTER
67 BS1-2024-020-000 "RING, RUBBER"
68 BS1-2026-020-000 "RING, RUBBER"
69 BS6-3324-000-000 "FILTER, AIR(EPIX FILTER)"
70 BS7-3044-000-000 VALVE
71 BS7-5049-000-000 "VALVE, REGULATOR"
72 WT2-5151-000-000 INSULTING WASHER
73 XB1-1300-509-000 "SCREW, MACHINE M3X5"
74 XB1-1300-802-000 "SCREW, STAINLESS PH3X8 (SUS)"
75 XB1-3300-601-000 "SCREW, MACHINE M3X6"
76 XB1-3300-806-000 "SCREW, MACHINE M3X8"
77 XB6-2300-308-000 SET SCREW (S)
78 XB6-2400-509-000 "SETSCREW, HEXAGON SOCKET"
79 XB7-1030-109-000 "BOLT, HEX SKT. (COD 03B) M3X10"
80 XB7-1100-259-000 BOLT
81 XB7-1100-309-000 BOLT
82 XD1-1102-125-000 "WASHER, COP"
83 XD1-2100-259-000 "WASHER, S"
84 XD1-2100-409-000 "WASHER, PLAIN M4 (S)"
85 XD1-3101-009-000 "WASHER, SPRING"
86 XD3-4300-082-000 "PIN, STRAIGHT"
87 XG8-1100-022-000 "BALL, STEEL SUS"
88 XZ1-1300-805-000 "SPACER, (220V GS CNLY)"
89 Y60-0098-000-000 "SWITCH UNIT, PUSH, STOP"
90 Y60-0100-000-000 "SWITCH UNIT, PUSH, START"
91 Y60-0101-000-000 "SWITCH UNIT, PUSH, RE-LOAD"
92 Y60-0102-000-000 "SWITCH UNIT, PUSH, RESET"
93 Y60-0606-020-000 "G-LINE FILTER (6NM-D), W/FRAME"
94 Y60-1269-000-000 NS FILTER SWITCHING UNIT
95 Y60-1471-000-000 MIRROR UNIT
96 Y60-1808-000-000 "LENS UNIT, CYLINDRICAL ZOOM"
97 Y60-1969-000-000 "PRISM UNIT, ES5"
98 Y75-2390-000-000 TEMPERATURE SENSOR UNIT(W2L)
99 Y75-4167-000-000 WATER FILTER CATRIDGE
100 Y75-8718-000-000 BRINE PUMP
101 Y75-8719-000-000 C-OIL PUMP
102 Y77-0180-000-000 "FILTER(NAS CLEAN), OIL"
103 BD1-5110-000-000 "PLATE,AL"
104 BD7-7606-000-000 "FOIL UNIT,B"
105 BD7-7607-000-000 "FOIL UNIT,C"
106 BD7-9906-000-000 "PIN,AL"
107 BD8-6856-000-000 "BASE,PLATE"
108 BD8-6893-000-000 BLOCK
109 BF6-6859-000-000 "MOTOR UNIT,BRUSHLESS,DC,5W"
110 BG6-4647-000-000 "MOTOR UNIT,STEEPPING DC 17.7W"
111 BG6-6611-000-000 "PCB ASS'Y. MXS CONT"
112 BG6-7915-000-000 "STARTER,LAMP,8KW"
113 BG6-7979-000-000 "LAMP,MERCURY,8KW"
114 BG6-8175-000-000 "OPTICAL SCALE UNIT,Z2"
115 BG6-9628-000-000 "MOTOR UNIT,DC,10WUNDER"
116 BH2-2348-000-000 "SWITCH,MAGNET"
117 BM0-0615-000-000 "CABLE UNIT,PA AMP"
118 BM1-0219-000-000 "WORK STATION UNIT, B2000 MIRROR"
119 BN9-5021-000-000 MIRROR UNIT
120 BS1-1566-000-000 SPRING
121 BS2-4418-000-000 "TIMING BELT,U"
122 BS2-8053-000-000 "BELT,PU(F),MOTOR DRIVE"
123 WL9-5110-000-000 "DRIVE,MOTOR"
124 Y60-5082-000-000 "MASKING BLADE UNIT(X),MPA-7000"
125 Y60-5107-000-000 KEYBOARD WITH MOUSE
126 Y60-5204-000-000 "AIR PAD UNIT,CERAMIC"
127 Y60-5205-000-000 "AIR PAD UNIT,CERAMIC"
128 Y60-5206-000-000 "AIR PAD UNIT,CERAMIC"
129 Y75-5560-000-000 CIRCUIT PROTECTOR
130 Y75-5794-000-000 SOLID STATE RELAY


No Part No Description
1 BY6-066-000-000 PILLOR OF SETTING TOOL FOR MPA-8800
2 Y75-9288-000-000 STATOR,LINEAR MOTOR(RYL)
3 BG3-6705-000-000 AC/DC POWER SUPPLY UNIT
4 BG3-7944-R00-000 WAFER FEED HAND UNIT(TYPE-L)
5 BH5-3291-000-000 AC/DC POWER SUPPLY UNIT
6 BY6-0495-000-000 GLASS PLATE UNIT,MASKBEND(SL)
7 BY6-0496-000-000 CHED Y60-5445 GLASS PLASS PLATE, MASK BEND
8 BY7-0490-000-000 CASTER,INNER FRAME(2PCS/SET)
9 BY9-9146-000-000 LIFTING ATTACHMENT FOR R/S
10 BY9-9401-R00-000  
11 BY9-9741-000-000 HOIST SET,ES3 INCOHERENT UNIT
12 Y60-1760-R00-000 SCAN OPTICAL YILT FOCUS UNIT
13 Y60-5037-000-000 X-MAG UNIT, MPA-7000
14 Y60-5038-000-000 ARC UNIT,MPA-7000
15 Y60-5340-000-000 MIRROR UNIT,ELLIPSE
16 BG4-7082-000-000 I LINE POWER SUPPLY
17 BG4-7082-R00-000 I LINE POWER SUPPLY
18 BY7-0492-000-000 JACK UNIT,HYDRAULIC
19 Y60-5438-000-000 GLASS UNIT,MASK BEND(CJ/1200)
20 Y60-5449-000-000 GLASS PLATE UNIT,MASK BEND"
21 Y60-2020-000-000 RETCLE ALIGNMENT UNIT,AS4
22 BG6-8841-000-000  
23 Y60-4778-000-000 ML HAND UNIT
24 BY7-1455-000-000 HAND W/EXTENSION ARM,SH UNIT
25 BM1-3932-000-000 GLASS PLATE STAGE
26 BY6-0376-000-000 GLASS PLATE,WITH CASE,PP(R)
27 BY6-0375-000-000 GLASS PLATE,WITH CASE,PP(R)
28 Y60-1817-000-000 SCH-INL AUTO FEEDER UNIT
29 Y60-1823-000-000 SCH-INL AUTO FEEDER UNIT
30 M-75 TACT-UP S/W MPA-7500→MPA-7800 TACT-UP SOFT
31 BG3-5896-000-000 SCH ROBOT UNIT(L)
32 BG6-7596-000-000 X-MAG UNIT, 2MM
33 BY6-0377-000-000 GLASS PLATE,WITH CASE,PPR"
34 BG6-9817-000-000 MSAK LOADER HAND
35 BG6-5804-000-000 PSY Moving Cable 断線対?
36 BM1-0219-000-000 WORK STATION UMIT,B2000 MIRROR
37 BS2-7182-000-000 linear Guide
38 BY9-9143-000-000 GLASS-PLATE,ADJUSTING PARTICLE
39 Y75-9289-000-000 STATOR,LINEAR MOTOR(RYR)
40 BG5-5191-000-000 Laser Power Source Cable(10m)
41 BG5-5192-000-000 Laser Power Source Cable(20m)
42 BM1-4783-000-000 POWER MASTER UNIT
43 BM1-3748-000-000 PCB ASS'Y,DRACK1
44 BY6-0589-000-000 CASE,IL,LENS ONIT PP(R)
45 BM1-3748-000-000 PCB ASS'Y,DRACK1
46 Y77-2177-000-000 COOLING COIL
47 0051Y109 FLEXBLE JOINT , SUS
48 0055T693 CONSOLE REMODEL UNIT
49 BS6-2995-000-000 GUIDE,BALL(COMPLEX BUSH)
2 63 BS6-2995-000-000
GUIDE,BALL(COMPLEX BUSH)
50 0060T701 CONSOLE CABLE SET
51 BM1-3637-000-000 PCB ASS'Y,IL IF MODULE
52 BM1-4380-000-000 CABLE UNIT CONGER 2
53 Y60-5238-000-000 GUIDE UNIT,L
54 Y60-5239-000-000 GUIDE UNIT,R
55 BM1-5364-000-000 FLEXIBLE CABLE CABLE UNIT,Y1
56 BM1-5365-000-000 FLEXIBLE CABLE CABLE UNIT,Y2
57 BM1-5366-000-000 FLEXIBLE CABLE CABLE UNIT,Y3
58 BM1-5367-000-000 FLEXIBLE CABLE CABLE UNIT,Y4
59 BM1-5368-000-000 FLEXIBLE CABLE CABLE UNIT,Y5
60 BM1-3407-000-000 LAMP LIGHYING UNIT
61 BG6-1908-R00-000 PANEL KEY BOARD UNIT
62 Y60-5146-000-000 BALL SCREW UNIT(FORK-Z)
64 0662W747 OPEN CASSETTE ELEVATOR(R )
65 0059T362 TEPAS SYSTEM SOFTWARE (CD-R=2PCS)


No Part No Description
1 010906  
2 0070T211  
3 031H-0003  
4 035H-0192  
5 068H-0373  
6 068H-1735  
7 077H-0432  
8 2D1-0242 TAPE, SILICONE, 1/16X 1X 10INCH
9 2D1-4221  
10 2D1-4221  
11 2D1-4354 HEAT TAPE, MXR & LEAD, LG
12 2G4-0458  
13 2H4-0161 PCB, CPU, CP-2007
14 2M4-0161  
15 97JB-2019  
16 BD4-1816 GUIDE PIN, PL
17 BD4-2565 LABEL, PET
18 BD4-5413-000 Lever(Wafer stage)
19 BD4-7497 CLEANING PLATE
20 BD4-7497 CLEANING PLATE
21 BD4-8853 LABEL, PET
22 BD7-9909  
23 BD7-9909  
24 BD8-0386  
25 BD8-0743 COVER, AL
26 BD8-0746 HOLDER
27 BD8-0749 HOLDER
28 BD8-0751 HOLDER
29 BD8-0752 HOLDER
30 BD8-0753 MANIFOLD
31 BD8-0775 WASHER, SUS
32 BD8-0991 PLATE
33 BD8-1113 COVER REAR, AL
34 BD8-1138 HOLDER, MIRROR
35 BD8-1537  
36 BD8-1538  
37 BD8-2432 COVER(R), AL
38 BD8-2433 COVER(FRONT), AL
39 BD8-2434 COVER(L), AL
40 BD8-2436 COVER(BOTTOM), AL
41 BD8-2469 COVER(UPPER), AL
42 BE1-3663 LABEL, PP(R), HAZARDOUR BEAM
43 BE1-4071 LABEL, PET
44 BE1-4092 LABEL, PET
45 BE1-7583 LABEL, PP(R)
46 BE1-7584 LABEL, PP(R)
47 BE9-3757 SHEET, POM
48 BE9-3821 PLATE, POM
49 BE9-3821 PLATE, POM
50 BE9-3821 PLATE, POM
51 BE9-4489  
52 BE9-4489  
53 BE9-4490  
54 BE9-4490  
55 BE9-4591  
56 BE9-4592  
57 BE9-4593  
58 BE9-4686  
59 BE9-4687  
60 BE9-4688  
61 BE9-4690  
62 BE9-4691  
63 BF6-8510 CABLE A'SSY(X12)
64 BF7-1809 TUBE A'SSY(Y16), ES2
65 BG3-3089  
66 BG3-3846 SWITCHING REGULATOR
67 BG3-3864 SWITCHING REGULATOR
68 BG3-3925 FET SW PCB A'SSY(YR)(RS STAGE)
69 BG3-4445 SCH/INL PCB ASS'Y
70 BG3-5555  
71 BG3-6594 INDEXER UNIT
72 BG3-6705 AC/DC POWER SUPPLY UNIT
73 BG3-7680 X-DRIVE UNIT, OBJECTIVE LENS(R)
74 BG3-7807 EXPO-CD APCB ASS'Y
75 BG3-7947 ROBOT UNIT, SCH(TYPE9-L)
76 BG4-2766(B) 5CH OPTF PCB(B)
77 BG4-3669 IL C/D PCB ASS'Y W/IC
78 BG4-5459-000 PIEZO DRIVE PCB
79 BG4-6052 PCB ASS'Y, RSCD2
80 BG4-6203 THETA-Z TILT UNIT
81 BG4-6457 XY STAGE PRE-AMP PCB ASS'Y
82 BG4-6457 XY STAGE PRE-AMP PCB ASS'Y
83 BG4-6457-000 XY STAGE PRE AMP PCB
84 BG4-6459-000 OFCD-IF PCB
85 BG4-6460-000 PIEZO ANALOG PCB
86 BG4-6579-000 MV CD PCB
87 BG4-6591-000 A-MOUNT CD PCB
88 BG4-6628-000 CAM UNIT
89 BG4-6631-000 CD I/F PCB ASSY
90 BG4-6632-000 TV IMAGE CPU PCB
91 BG4-6673-000 HROA CD PCB
92 BG4-6698-000 STARTER FOR 2KW MERCURY LAM
93 BG4-6728(B) RS PCB(B)
94 BG4-6755-000 SH PCB
95 BG4-6794-000 W/F SCH/EL PCB ASSY
96 BG4-6823 WF CPU PCB
97 BG4-6943-000 ALS CD PCB ASSY
98 BG4-6974 E-CD PCB ASS'Y
99 BG4-7142-000 CABLE BD-32
100 BG4-7329 PPC PCB ASS'Y
101 BG4-7432 CONTROLLER 1, PCB ASS'Y
102 BG4-7521 SCH ROBOT UNIT (R)
103 BG4-7521 SCH ROBOT UNIT (R)
104 BG4-7841 CABLE RCRS-1
105 BG4-8353 REMOTE TERMINAL KITS
106 BG4-8680-000 EXPO-CD PCB
107 BG4-8700  
108 BG4-9151-000 FZANA IF PCB
109 BG4-9159-000 STAGE DIST.PCB ASSY(FOR I5)
110 BG4-9193-000 SRC CABLE(i-LINE)
111 BG5-0422 HAND UNIT(SH-L)
112 BG5-4077 SENSOR DIST PCB-R ASS'Y
113 BG5-4077 SENSOR DIST PCB-R ASS'Y
114 BG5-4805 LB/EL-DT PCB ASS'Y
115 BG5-4823 RETICLE ROBOT FUNCTION UNIT
116 BG5-4866 RTHZ-DT PCB ASS'Y
117 BG5-5621 HEATER UNIT, F
118 BG5-5622 HEATER UNIT, B
119 BG5-5623 HEATER UNIT, L
120 BG5-5624 HEATER UNIT, R
121 BG6-0103  
122 BG6-5709 CABLE UNIT, MH8
123 BG6-5710 CABLE UNIT, MH9
124 BG6-5712 CABLE UNIT, MH11
125 BG6-6321 CABLE UNIT, XMAG1
126 BG6-6323 CABLE UNIT, XMG3
127 BG6-6324 CABLE UNIT, XMG4
128 BG6-7209  
129 BG6-8062  
130 BG6-8211 PHOTO SENSOR UNIT, PS-MH-FMK
131 BG6-9404  
132 BG6-9628 MOTOR UNIT, DC, 10WUNDER
133 BG8-1677  
134 BG8-2642  
135 BG8-3851  
136 BG9-0935 PM DRIVE PCB ASS'Y, GE(CU35)
137 BG9-0935 PM DRIVE PB ASS'Y, GE (CU35)
138 BG9-3701 PHOTO SWITCH PCB ASS'Y
139 BG9-3727 XY STAGE CPU PCB ASS'Y W/IC
140 BG9-3779(B) PZ-A2 PCB(B)
141 BH2-1164-000 MAGNETIC VALVE
142 BH2-1202 VALVE, SOLENOID
143 BH2-1218(BH2-1166) MAGNETIC VALVE(W/F-3-PIN)
144 BH5-3739 DRIVER UNIT, MOTOR
145 BH5-3770 LAMP CONTROLLER PANEL UNIT
146 BH5-3771 CABLE INIT, FOR 2 LIGHTS
147 BH5-6314 LASER HEAD
148 BH5-7841 PCB, EXTENSION
149 BH5-9101  
150 BH8-1309  
151 BH8-1309-01  
152 BH8-1843  
153 BH8-2681  
154 BH9-0105 KEYBOARD
155 BH9-0451  
156 BH9-0451  
157 BM0-0274  
158 BM0-0470  
159 BM0-0470 DISTORTION COMPENSATE UNIT
160 BM0-0819 PCB ASS'Y, XZ3
161 BM1-1126 PCB ASS'Y, DSPY2
162 BM1-2297 PCB ASS'Y, MS DIST
163 BM1-3378 PCB ASS'Y, PLMV8
164 BM1-3478  
165 BM1-3637 PCB ASS'Y, IL, IF MODULE
166 BM1-3638  
167 BM1-3747 LINERA MOTOR UNIT, DC 70W OVER
168 BM1-4380 CABLE UNIT, CONGET 2
169 BM2-9114  
170 BM3-6714 MISC-IF2 PCB ASS'Y
171 BM3-7023  
172 BM4-1158  
173 BM6-3950  
174 BM8-1693  
175 BM8-3143  
176 BM9-0105  
177 BN9-2615-001-327 FILTER OPTICAL
178 BN9-2615-006-230 FILTER OPTICAL
179 BN9-2615-006-238 FILTER OPTICAL
180 BN9-7069-000 GLASS PLATE
181 BN9-7407 MIRROR
182 BS0-4043 SPACER
183 BS0-4475 SHIM TAPE, SUS(0.005MM)
184 BS0-4476 SHIM TAPE, SUS(0.01MM)
185 BS0-4477 SHIM TAPE, SUS(0.02MM)
186 BS0-4478 SHIM TAPE, SUS(0.03MM)
187 BS0-4480  
188 BS0-6384  
189 BS2-4301 COUPLING
190 BS2-4322-000 TIMING BELT
191 BS2-4323-000 TIMING BELT
192 BS6-0121 TUBR-R, RUBBER(PER METER)
193 BS6-0992  
194 BS6-1132 WASHER
195 BS6-1132 WASHER
196 BS6-1233 SUPPORTER M4, L=25
197 BS6-1420 TUBE, GREEN
198 BS6-1502 SPACER (8)
199 BS6-2995 GUIDE, BALL(COMPLEX BUSH)
200 BS6-2995 GUIDE, BALL(COMPLEX BUSH)
201 BS6-3283 WASHER, SUS
202 BS6-3283 WASHER, SUS
203 BS7-0016 TUBE, BLUE, P. URETHANE(R)
204 BS7-0161 TUBE, PFC, PER METER(8MM)
205 BS7-0161 TUBE, PFC, PER METER(8MM)
206 BS7-1060 FILTER, AIR
207 BS7-1060 FILTER, AIR
208 BS7-1546 JOINT
209 BS7-1546 JOINT
210 BS7-1548 ELBOW
211 BS7-1548 ELBOW
212 BS7-3163 VALVE, SPEED CONTROLLER
213 BS7-4111 BF DIAPHRAM CYLINDER
214 BS7-4111 BF DIAPHRAM CYLINDER
215 BS8-0245 JOINT
216 BS8-1278 UNION
217 BW0-3257-001  
218 BY6-0590  
219 BY6-0590  
220 BY7-1455 HAND W/EXTENSION ARM, SH UNIT
221 BY7-1455 HAND W/EXTENSION ARM, SH UNIT
222 BY9-3401 LENS CLEANING PAPER(K-1)
223 BY9-3401 LENS CLEANING PAPER(K-1)
224 BY9-3402 LENS CLEANING PAPER(K-3)
225 BY9-9143 GLASS-PLATE, ADJUSTING PARTICLE
226 PH4-0104-01  
227 PH4-0104-01  
228 SQR-03024  
229 VC4-2502-270  
230 VC8-3040-227 CAPACITOR, 220UF, 50V
231 VD7-0332-001 FUSE, 0.2A
232 WGM-021-00  
233 WL9-5009 DRIVER, PULSE MOTOR
234 WL9-5009 DRIVE, PULSE MOTOR
235 WT1-0225 SPLICE TERMINAL
236 X62-6809 CLIP-3N, NYLON(R)
237 X62-6856 CLAMP, CABLE, 4N
238 X62-6866 CLAMP, CABLE, 2N
239 XA1-1200 SCREW
240 XA1-7200 SCREW
241 XA1-7200-302 SCREW
242 XA1-7200-302  
243 XA1-7200-402 SCREW
244 XA1-7200-402  
245 XB1-1200 SCREW
246 XB1-1300-806 SCREW
247 XB1-2100-302  
248 XB1-2300 SCREW
249 XB1-2300 SCREW
250 XB1-2300 SCREW
251 XB1-2300-602 SCREW
252 XB1-2400 SCREW
253 XB1-2400 SCREW
254 XB1-2400-602 VALVE, SPEED CONTROLLER
255 XB1-2401 SCREW, BH, M4X10
256 XB1-2402  
257 XB1-3300 SCREW
258 XB1-3300 SCREW
259 XB1-3300 SCREW
260 XB1-3300-602 SCREW
261 XB1-3301 SCREW
262 XB1-3301 SCREW
263 XB1-3301 SCREW
264 XB1-3301 SCREW
265 XB1-3401 SCREW
266 XB7-1030 SCREW CAP
267 XB7-1030 SCREW CAP
268 XB7-1030 SCREW CAP
269 XB7-1030 SCREW CAP
270 XB7-1030 SCREW CAP
271 XB7-1030-066 SCREW CAP
272 XB7-1030-066 SCREW CAP
273 XB7-1030-066 SCREW CAP
274 XB7-1030-102 SCREW CAP
275 XB7-1030-102 SCREW CAP
276 XB7-1040 SCREW CAP
277 XB7-1040 SCREW CAP
278 XB7-1040 SCREW CAP
279 XB7-1040 SCREW CAP
280 XB7-1040 SCREW CAP
281 XB7-1040 SCREW CAP
282 XB7-1040-046 SCREW CAP
283 XB7-1040? SCREW
284 XB7-1050 SCREW
285 XB7-1060-169 SCREW CAP
286 XB7-1060-169  
287 XB7-1060-259 SCREW CAP
288 XB7-1060-259  
289 XB7-1100-309  
290 XB7-2100 NUT
291 XB7-2200-309 NUT
292 XD1-1102-125 WASHER
293 XD1-2100 WASHER
294 XD1-2100-402 WASHER
295 XD1-2101-009 WASHER
296 XD1-2101-009  
297 XD1-3100 SPRING WASHER
298 XD1-3100 SPRING WASHER
299 XD1-3100-109  
300 XD1-3100-609 SPRING WASHER
301 XD1-3101-009  
302 XD1-3101-009  
303 XD3-4120-032  
304 XD3-4120-032  
305 XD3-4120-032  
306 XD7-1040  
307 XD7-1100-309  
308 Y60-0862-000 LENS UNIT, 1ST CONDENSER LAMP 1
309 Y60-1010 PLANE PARALLEL PLATE UNIT
310 Y60-1276-00 LAMBDA/4 PALTE UNIT
311 Y60-1354 SEAL GLASS UNIT FOR GP
312 Y60-1479-000 SCH ROBOT(RIGHT)
313 Y60-1708 RETICLE ALIGNMENT UNIT
314 Y60-1722 RETICLE LIFT UNIT
315 Y60-1722 RETICLE LIFT UNIT
316 Y60-1722 RETICLE LIFT UNIT
317 Y60-1722 RETICLE LIFT UNIT
318 Y60-1821 PA-SH AUTO FEEDER UNIT
319 Y60-5146 BALL SCREW UNIT(FORK-Z)
320 Y60-5146 BALL SCREW UNIT(FORK-Z)
321 Y60-5238 GUIDE UNIT, L
322 Y60-5239 GUIDE UNIT, R
323 Y60-5311 PERIPHERAL LIFT PIN UNIT, FL.RR
324 Y60-5431 MASK BEND FLAME UNIT
325 Y60-5444 GLASS PLATE UNIT, MASK BEND(SL)
326 Y60-5522  
327 Y60-5529 PLATE UNIT, MASK BEND(AL)
328 Y75-0402 VALVE, REGULATOR
329 Y75-0403 VALVE, REGULATOR
330 Y75-0791 VALVE, AIR RILOTED
331 Y75-2044 FAN
332 Y75-4136 PUMP UNIT, C-OIL
333 Y75-6749 DISPLACEMENT SENSOR
334 Y75-6905-000 SRC CABLE(B)
335 Y75-9288 STATOR, LINEAR MOTOR(RYL)
336 Y75-9288 STATOR, LINEAR MOTOR(RYL)
337 Y77-2025 COVER, SUS
338 Y77-2622 HOSE DUCT, PP(R)
339 Y77-2623 HOSE DUCT, PP(R)
340 Y77-2624 HOSE DUCT, PP(R)
341 Y77-2625 HOSE DUCT, PP(R)
342 Y77-2626 HOSE DUCT, PP(R)
343 Y77-2627 HOSE DUCT, PP(R)
344 Y77-2628 HOSE DUCT, PP(R)
345 Y77-2629 HOSE DUCT, PP(R)
346 Y77-2630 HOSE DUCT, PP(R)
347 Y77-2631 HOSE DUCT, PP(R)
348 Y77-2632 HOSE DUCT, PP(R)
349 Y77-2633 HOSE DUCT, PP(R)
350 Y77-2634 HOSE DUCT, PP(R)
351 Y77-2635 HOSE DUCT, PP(R)
352 Y77-2636 HOSE DUCT, PP(R)
353 Y77-2637 HOSE DUCT, PP(R)
354 Y77-2638 HOSE DUCT, PP(R)
355 Y77-2639 HOSE DUCT, PP(R)
356 Y77-2640 HOSE DUCT, PP(R)
357 Y77-2641 HOSE DUCT, PP(R)
358 Y77-2642 HOSE DUCT, PP(R)
359 Y77-2643 HOSE DUCT, PP(R)
360 Y77-2644 HOSE DUCT, PP(R)
361 Y77-2645 HOSE DUCT, PP(R)
362 Y77-2647 HOSE UNIT, DUCT, PP(R)
363 Y78-1021  
364 Y78-2616  
365 Y78-2770  
366 Y78-2771  
367 Y78-2821  
368 Y78-2994  
369 Y78-2994  
370 Y78-2995  
371 Y78-2995  
372 Y78-2996  
373 Y78-2996  
374 Y78-2997  
375 Y78-2997  
376 Y78-2998  
377 Y78-2999  
378 Y78-3093  
379 Y78-3094  
380 Y78-3095  
381 Y78-3096  
382 Y78-3097  
383 Y78-3124  
384 Y78-3132  
385 Y78-3133  
386 Y78-3137  
387 Y78-3139  
388 Y78-3145  
389 Y78-3146  
390 Y78-3147  
391 Y78-3148  
392 Y78-3149  
393 Y78-3182  
394 Y78-3183  
395 Y78-3184  
396 Y78-3185  
397 Y78-3186  
398 Y78-3187  
399 Y78-3188  
400 Y78-3189  
401 Y78-3190  
402 Y78-3258  
403 Y78-3259  
404 Y78-3262  
405 Y78-3262  
406 Y78-3264  
407 Y78-3265  
408 Y78-3265  
409 Y78-3353  
410 Y78-3354  
411 Y78-3357 L  
412 Y78-3358 R  
413 Y78-3359  
414 Y78-3360  
415 Y78-3361  
416 Y78-3362  
417 Y78-3363  
418 Y78-3374  
419 Y78-3375  
420 Y78-3508  
421 Y78-3627  
422 Y78-3628  
423 Y78-3629  
424 Y78-3630  
425 Y78-3632  
426 Y78-3632  
427 Y78-3633  
428 Y78-3634  
429 Y78-3635  
430 Y78-3636  
431 Y78-3637  
432 Y78-3638  
433 Y78-3806  
434 Y78-3821  
435 Y78-3822  
436 Y78-3823  
437 Y78-3824  
438 Y78-3825  
439 Y78-3843  
440 Y78-3844  
441 Y78-3906  
442 Y78-3906  
443 Y78-3908  
444 Y78-3908  
445 Y78-3909  
446 Y78-3909  
447 Y78-3910  
448 Y78-3910  
449 Y78-3911  
450 Y78-3911  
451 Y78-3912  
452 Y78-3912  
453 Y78-3946  
454 Y78-4080  
455 Y78-4080  
456 Y78-4081  
457 Y78-4081  
458 Y78-4082  
459 Y78-4082  
460 Y78-4236  
461 Y78-4362  
462 Y78-4363  
463 Y78-4364  
464 Y78-4365  
465 Y78-4366  
466 Y78-4367  
467 Y78-4370  
468 Y78-4370  
469 Y78-4371  
470 Y78-4390  
471 Y78-4390  
472 Y78-4390  
473 Y78-4390  
474 Y78-4391  
475 Y78-4391  
476 Y78-4391  
477 Y78-4391  
478 Y78-4392  
479 Y78-4392  
480 Y78-4392  
481 Y78-4392  
482 Y78-4393  
483 Y78-4393  
484 Y78-4394  
485 Y78-4395  
486 Y78-4395  
487 Y78-4396  
488 Y78-4397  
489 Y78-4398  
490 Y78-4399  
491 Y78-4417  
492 Y78-4421  
493 Y78-4727  
494 Y78-4728  
495 Y78-4729  
496 Y78-4730  
497 Y78-4731  
498 Y78-4811  
499 Y78-4811  
500 Y78-4812  
501 Y78-4812  
502 Y78-4813  
503 Y78-4816  
504 Y78-4816  
505 Y78-4817  
506 Y78-4817  
507 Y78-4905  
508 Y78-4913  
509 Y78-4926  
510 Y78-4926  
511 Y78-4927  
512 Y78-4927  
513 Y78-4928  
514 Y78-4928  
515 Y78-4928  
516 Y78-4928  
517 Y78-4929  
518 Y78-4929  
519 Y78-4930  
520 Y78-4930  
521 Y78-4931  
522 Y78-4931  
523 Y78-4932  
524 Y78-4932  
525 Y78-4933  
526 Y78-4933  
527 Y78-4934  
528 Y78-4934  
529 Y78-4935  
530 Y78-4935  
531 Y78-4935  
532 Y78-4936  
533 Y78-4936  
534 Y78-4937  
535 Y78-4937  
536 Y78-4938  
537 Y78-4938  
538 Y78-4939  
539 Y78-4939  
540 Y78-4940  
541 Y78-4941  
542 Y78-4941  
543 Y78-4942  
544 Y78-4942  
545 Y78-4943  
546 Y78-4943  
547 Y78-4945  
548 Y78-4991  
549 Y78-4992  
550 Y78-4993  
551 Y78-5165  
552 Y78-5166  
553 Y78-5167  
554 Y78-5168  
555 Y78-5278  
556 Y78-5329  
557 Y78-5330  
558 Y78-5331  
559 Y78-5332  
560 Y78-5371  
561 Y78-5477  
562 Y78-5477  
563 Y78-5477  
564 Y78-5478  
565 Y78-5478  
566 Y78-5479  
567 Y78-5479  
568 Y78-5480  
569 Y78-5480  
570 Y78-5480  
571 Y78-5481  
572 Y78-5481  
573 Y78-5481  
574 Y78-5482  
575 Y78-5482  
576 Y78-5482  
577 Y78-5483  
578 Y78-5483  
579 Y78-5484  
580 Y78-5484  
581 Y78-5485  
582 Y78-5485  
583 Y78-5486  
584 Y78-5486  
585 Y78-5487  
586 Y78-5487  
587 Y78-5487  
588 Y78-5488  
589 Y78-5488  
590 Y78-5489  
591 Y78-5555  
592 Y78-5555  
593 Y78-5556  
594 Y78-5556  
595 Y78-5557  
596 Y78-5557  
597 Y78-5559  
598 Y78-5613  
599 Y78-5674  
600 Y78-5704  
601 Y78-5705  
602 Y78-5706  
603 Y78-5716  
604 Y78-5721  
605 Y78-5758  
606 Y78-5759  
607 Y78-5793  
608 Y78-5793  
609 Y78-5795  
610 Y78-5888  
611 Y78-5888  
612 Y78-5888  
613 ZVD-8939